Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4380488 | Process and gas mixture for etching aluminum | Richard F. Reichelderfer, Marian C. Tang | 1983-04-19 |
| 4324611 | Process and gas mixture for etching silicon dioxide and silicon nitride | Marian C. Tang, Richard F. Reichelderfer | 1982-04-13 |