Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770424 | Wafer track apparatus and methods for dispensing fluids with rotatable dispense arms | Robert P. Mandal | 2004-08-03 |
| 6717113 | Method for substrate thermal management | — | 2004-04-06 |
| 6509577 | Systems and methods for exposing substrate periphery | Larry Stark, Bryan Wade | 2003-01-21 |
| 6472643 | Substrate thermal management system | — | 2002-10-29 |
| 6414276 | Method for substrate thermal management | — | 2002-07-02 |
| 6322337 | Liquid dispensing systems and methods | Douglas S. Bensley, John E. Barney, Frank Dimaggio, Mark Tanny | 2001-11-27 |