Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4724222 | Wafer chuck comprising a curved reference surface | — | 1988-02-09 |
| 4636080 | Two-dimensional imaging with line arrays | — | 1987-01-13 |
| 4626103 | Focus tracking system | David N. Reece, John S. Wagner | 1986-12-02 |
| 4614433 | Mask-to-wafer alignment utilizing zone plates | Peter Heimann, William A. Johnson, Theodore F. Retajczyk, Jr., Donald L. White | 1986-09-30 |
| 4595289 | Inspection system utilizing dark-field illumination | Lynn Wilson | 1986-06-17 |
| 4398824 | Wafer tilt compensation in zone plate alignment system | Alan D. White, Donald L. White | 1983-08-16 |
| 4326805 | Method and apparatus for aligning mask and wafer members | Alan D. White, Donald L. White | 1982-04-27 |