Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191114 | Semiconductor reaction chamber and atomic layer plasma etching apparatus | Masaya Odagiri, Gang Wei, Guodong Chen | 2025-01-07 |
| 12080524 | Semiconductor processing chamber | Yan Li, Shixuan Guo | 2024-09-03 |
| 11694880 | Lift thimble system, reaction chamber, and semiconductor processing equipment | — | 2023-07-04 |
| 11410833 | Lower electrode mechanism and reaction chamber | Yahui Huang, Gang Wei, Yicheng Li | 2022-08-09 |