Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5039913 | Method for the cooling of targets as well as cooling device for targets | Urs Wegmann | 1991-08-13 |
| 4619748 | Method and apparatus for the reactive vapor deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate | Eberhard Moll, Hans K. Pulker | 1986-10-28 |