DM

Darren L. Moore

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,235,271 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8338315 Processes for curing silicon based low-k dielectric materials Carlo Waldfried, Ganesh Karuppur Rajagopalan 2012-12-25