Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7470470 | System and method for forming multi-component dielectric films | Yoshihide Senzaki | 2008-12-30 |
| 6761770 | Atmospheric pressure wafer processing reactor having an internal pressure control system and method | Lawrence D. Bartholomew, Robert J. Bailey, Soon Yuh | 2004-07-13 |