Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7309662 | Method and apparatus for forming a film on a substrate | Knut Beekmann, Christopher Dobson, John MacNeil, Antony Paul Wilby | 2007-12-18 |
| 7205246 | Forming low k dielectric layers | John MacNeil, Sajid Ishaq, Hervé Gris | 2007-04-17 |