Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5904523 | Process for device fabrication in which a layer of oxynitride is formed at low temperatures | Leonard C. Feldman, Martin L. Green | 1999-05-18 |
| 5863843 | Wafer holder for thermal processing apparatus | Martin L. Green | 1999-01-26 |