Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6520348 | Multiple inclined wafer holder for improved vapor transport and reflux for sealed ampoule diffusion process | Dutt V. Bulusu, Robert L. Mcanally, Michael Geva, Gustav E. Derkits, Jr. | 2003-02-18 | $23,047,000 |