Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5958654 | Lithographic process and energy-sensitive material for use therein | Mary Ellen Galvin-Donoghue, Francis Houlihan, Omkaram Nalamasu, Thomas X. Neenan | 1999-09-28 |
| 5741629 | Resist materials and related processes | Edwin Arthur Chandross, Omkaram Nalamasu, Elsa Reichmanis, Kathryn E. Uhrich | 1998-04-21 |
| 5728506 | Lithographic processes employing radiation sensitive polymers and photosensitive acid generators | — | 1998-03-17 |