Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8572522 | Illumination-source shape definition in optical lithography | Kazuya Iwase | 2013-10-29 |
| 4912325 | Method for sample analysis by sputtering with a particle beam, and device to implement said method | Wielfried Vandervorst, Bernard Rasser | 1990-03-27 |