Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10168624 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2019-01-01 |
| 9857699 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2018-01-02 |
| 9507270 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2016-11-29 |
| 8830440 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2014-09-09 |
| 8164734 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2012-04-24 |
| 7481867 | Vacuum system for immersion photolithography | Andrew John Harpham, Paul Alan Stockman | 2009-01-27 |