Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10168624 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2019-01-01 |
| 9857699 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2018-01-02 |
| 9507270 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2016-11-29 |
| 8830440 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2014-09-09 |
| 8164734 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2012-04-24 |
| 7481867 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2009-01-27 |
| 7368000 | Treatment of effluent gases | Ravi Jain, Julian Richard Dean, Robert Bruce Grant, Naum Perelman, Paul Alan Stockman +2 more | 2008-05-06 |