Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8136078 | Optimization | Axel Nackaerts, Paul Marchal | 2012-03-13 |
| 7786477 | Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method | Mircea Dusa, Axel Nackaerts | 2010-08-31 |
| 7704850 | Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method | Mircea Dusa, Axel Nackaerts | 2010-04-27 |