Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8947634 | Apparatus for supporting an optical element, and method of making same | Sohrab Simani | 2015-02-03 |
| 8625070 | Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing method | Santiago del Puerto, Samir Nayfeh | 2014-01-07 |