Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7248336 | Method and system for improving focus accuracy in a lithography system | Michael L. Nelson, Justin Kreuzer, Christopher Mason | 2007-07-24 |
| 7053984 | Method and systems for improving focus accuracy in a lithography system | Michael L. Nelson, Justin Kreuzer, Christopher Mason | 2006-05-30 |
| 6859260 | Method and system for improving focus accuracy in a lithography system | Michael L. Nelson, Justin Kreuzer, Christopher Mason | 2005-02-22 |