Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761435 | Reticle clamping device | Brandon Adam EVANS, Daniel Nathan Burbank, Ankur Ramesh BAHETI, Samir Nayfeh | 2020-09-01 |
| 9915674 | Methods and apparatus for measuring aspiration pressure | — | 2018-03-13 |
| 9335621 | Lithographic apparatus with an object support having actuating structures to apply a force and method for operating the same | — | 2016-05-10 |
| 9274439 | Reticle clamping system | — | 2016-03-01 |
| 9229341 | Reticle support that reduces reticle slippage | Santiago del Puerto | 2016-01-05 |
| 8885148 | System and method for design of linear motor for vacuum environment | — | 2014-11-11 |
| 8308452 | Dual chamber valveless MEMS micropump | Farid Amirouche | 2012-11-13 |