Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021723 | Method of plasma treatment using amplitude-modulated RF power | Mitsutoshi Shuto, Yasuaki Suzuki | 2011-09-20 |
| 7718004 | Gas-introducing system and plasma CVD apparatus | Kiyoshi Satoh, Kazuya Matsumoto | 2010-05-18 |