Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021723 | Method of plasma treatment using amplitude-modulated RF power | Yasushi Fukasawa, Yasuaki Suzuki | 2011-09-20 |
| 7514934 | DC bias voltage measurement circuit and plasma CVD apparatus comprising the same | Yasuaki Suzuki | 2009-04-07 |
| 5192371 | Substrate supporting apparatus for a CVD apparatus | Yasushi Fukazawa, Minoru Ohsaki | 1993-03-09 |