Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183546 | Substrate processing apparatus | YongGyu Han, SangJean Jeon, DooHan Kim, Sangyeop LEE | 2024-12-31 |
| 11414760 | Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same | JeungHoon Han, DooHan Kim, YongGyu Han | 2022-08-16 |
| 11274369 | Thin film deposition method | JeungHoon Han, DooHan Kim, YongGyu Han, TaeHee Yoo, WanGyu Lim +1 more | 2022-03-15 |