Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183546 | Substrate processing apparatus | KiChul Um, YongGyu Han, SangJean Jeon, Sangyeop LEE | 2024-12-31 |
| 11414760 | Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same | KiChul Um, JeungHoon Han, YongGyu Han | 2022-08-16 |
| 11274369 | Thin film deposition method | KiChul Um, JeungHoon Han, YongGyu Han, TaeHee Yoo, WanGyu Lim +1 more | 2022-03-15 |