Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5938943 | Near Substrate reactant Homogenization apparatus | Robert B. Campbell, Robert L. Jarecki, Jr., Gary D. Tipton | 1999-08-17 |
| 5228950 | Dry process for removal of undesirable oxide and/or silicon residues from semiconductor wafer after processing | Jennifer M. Webb, Chester A. Szwejkowski | 1993-07-20 |
| 5030590 | Process for etching polysilicon layer in formation of integrated circuit structure | Ian Latchford | 1991-07-09 |