Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459405 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Nitin K. Ingle, Zheng Yuan | 2008-12-02 |
| 7208425 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Nitin K. Ingle, Zheng Yuan | 2007-04-24 |
| 7037859 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Nitin K. Ingle, Zheng Yuan | 2006-05-02 |
| 6905940 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Nitin K. Ingle, Zheng Yuan | 2005-06-14 |