Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903102 | Methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter +2 more | 2021-01-26 |
| 10510570 | Systems, apparatus, and methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter +2 more | 2019-12-17 |
| 6387764 | Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth | Todd Curtis, Kerem Kapkin | 2002-05-14 |