Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8016945 | Hafnium oxide ALD process | Thomas Werner ZILBAUER, Ignaz Eisele, Jan Matusche | 2011-09-13 |
| 6221784 | Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching | Walter Schoenleber, Michael J. Schmidt | 2001-04-24 |