Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7265382 | Method and apparatus employing integrated metrology for improved dielectric etch efficiency | Dimitris Lymberopoulos, Gary Hsueh | 2007-09-04 |
SM
Sukesh Mohan — 1 Patent
Overall (All Time): #3,395,247 of 4,157,543Top 85%
1
Patents All Time