Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7265382 | Method and apparatus employing integrated metrology for improved dielectric etch efficiency | Dimitris Lymberopoulos, Gary Hsueh | 2007-09-04 | $16,959,000 |