Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868147 | Optical emission spectroscopy control of gas flow in processing chambers | Sunil Kumar Garg, Paul Kiely, Keith A. Miller, Rajat Agrawal | 2024-01-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868147 | Optical emission spectroscopy control of gas flow in processing chambers | Sunil Kumar Garg, Paul Kiely, Keith A. Miller, Rajat Agrawal | 2024-01-09 |