Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6143078 | Gas distribution system for a CVD processing chamber | Tetsuya Ishikawa, Feng Gao, Alan W. Collins, Lily Pang | 2000-11-07 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6143078 | Gas distribution system for a CVD processing chamber | Tetsuya Ishikawa, Feng Gao, Alan W. Collins, Lily Pang | 2000-11-07 |