Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688358 | R.F. plasma reactor with larger-than-wafer pedestal conductor | Yoichiro Tanaka, Barney M. Cohen | 1997-11-18 |
MT
Megumi Taoka
Overall (All Time): #3,729,679 of 4,157,543Top 90%
1
Patents All Time