Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9012336 | Method for conformal treatment of dielectric films using inductively coupled plasma | Heng Pan, Matthew S. Rogers, Johanes F. Swenberg, Christopher S. Olsen, Wei Liu +1 more | 2015-04-21 |