Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5926743 | Process for chlorine trifluoride chamber cleaning | Ming Xi, Steve Chen, Toshiaki Fujita | 1999-07-20 |
| 5849092 | Process for chlorine trifluoride chamber cleaning | Ming Xi, Steve Chen, Toshiaki Fujita | 1998-12-15 |