Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991109 | Apparatus for etching high aspect ratio features | Xiaoping Zhou | 2018-06-05 |
| 8475625 | Apparatus for etching high aspect ratio features | Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly A. McDonough, Jivko Dinev +9 more | 2013-07-02 |
| 8440049 | Apparatus for etching high aspect ratio features | Xiaoping Zhou | 2013-05-14 |