Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890403 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor | Alexandros T. Demos | 2005-05-10 |
| 6461980 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor chamber | Alexandros T. Demos | 2002-10-08 |