Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8287650 | Low sloped edge ring for plasma processing chamber | Changhun Lee, Michael D. Willwerth | 2012-10-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8287650 | Low sloped edge ring for plasma processing chamber | Changhun Lee, Michael D. Willwerth | 2012-10-16 |