Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205791 | Rating substrate support assemblies based on impedance circuit electron flow using machine learning | Arvind Raman, John C. Forster | 2025-01-21 |
| 12067485 | Long short-term memory anomaly detection for multi-sensor equipment monitoring | Sima Didari, Tianqing Liao | 2024-08-20 |
| 11862493 | Correcting component failures in ion implant semiconductor manufacturing tool | Tianqing Liao, Sima Didari | 2024-01-02 |
| 11348813 | Correcting component failures in ion implant semiconductor manufacturing tool | Tianqing Liao, Sima Didari | 2022-05-31 |
| 11133204 | Chamber matching with neural networks in semiconductor equipment tools | Heng HAO, Tianqing Liao, Sima Didari | 2021-09-28 |