Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967514 | Apparatus and method for controlling process | Sung Min Lim | 2024-04-23 |
| 10265742 | Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber | Kee Young Cho, Sang-wook Kim, Joo Won Han | 2019-04-23 |
| 9236255 | Methods for forming three dimensional NAND structures atop a substrate | Sang-wook Kim, Joo Won Han, Kee Young Cho, Kuan-Ting Liu, Anisul Khan | 2016-01-12 |
| 8937021 | Methods for forming three dimensional NAND structures atop a substrate | Sang-wook Kim, Joo Won Han, Kee Young Cho, Anisul Khan | 2015-01-20 |
| 8932947 | Methods for forming a round bottom silicon trench recess for semiconductor applications | Joo Won Han, Kee Young Cho, Sang-wook Kim, Anisul Khan | 2015-01-13 |