Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8556679 | Substrate polishing metrology using interference signals | Manoocher Birang | 2013-10-15 |
| 8092274 | Substrate polishing metrology using interference signals | Manoocher Birang | 2012-01-10 |
| 7841926 | Substrate polishing metrology using interference signals | Manoocher Birang | 2010-11-30 |
| 7731566 | Substrate polishing metrology using interference signals | Manoocher Birang | 2010-06-08 |
| 5964643 | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations | Manoocher Birang | 1999-10-12 |
| 5612850 | Releasing a workpiece from an electrostatic chuck | Manoocher Birang | 1997-03-18 |
| 5459632 | Releasing a workpiece from an electrostatic chuck | Manoocher Birang | 1995-10-17 |