Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358745 | Roll exchange chamber, roll-to-roll processing system and method of continuously providing a flexible substrate | Thomas LEIPNITZ | 2025-07-15 |
| 11795541 | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system | Claire ARMSTRONG, Thomas DEPPISCH | 2023-10-24 |
| 10818475 | AC power connector, sputtering apparatus and method therefor | Anke HELLMICH, Stefan Keller, Marcus Bender | 2020-10-27 |
| 10174415 | Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatus | Anke HELLMICH, Thomas Koch, Thomas DEPPISCH | 2019-01-08 |
| 8623184 | Device for supporting a rotatable target and sputtering apparatus | Jürgen Multerer | 2014-01-07 |