Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11795541 | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system | Frank SCHNAPPENBERGER, Thomas DEPPISCH | 2023-10-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11795541 | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system | Frank SCHNAPPENBERGER, Thomas DEPPISCH | 2023-10-24 |