Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541297 | Method and system for improving dielectric film quality for void free gap fill | Abhijit Basu Mallick, Jeffrey C. Munro, Linlin Wang, Srinivas D. Nemani, Yi Zheng +2 more | 2009-06-02 |