Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5974679 | Measuring the profile of a polishing pad in a chemical mechanical polishing system | Manoocher Birang | 1999-11-02 |
| 5875559 | Apparatus for measuring the profile of a polishing pad in a chemical mechanical polishing system | Manoocher Birang | 1999-03-02 |