Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406553 | Method to reduce contaminants from semiconductor wafers | — | 2002-06-18 |
| 6228208 | Plasma density and etch rate enhancing semiconductor processing chamber | Thorsten Lill | 2001-05-08 |