Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6674383 | PWM-based measurement interface for a micro-machined electrostatic actuator | David Horsley, Robert Conant | 2004-01-06 |
| 6440766 | Microfabrication using germanium-based release masks | — | 2002-08-27 |
| 6433401 | Microfabricated structures with trench-isolation using bonded-substrates and cavities | Mark Alan Lemkin, Thor Juneau, Allen W. Roessig | 2002-08-13 |
| 6386032 | Micro-machined accelerometer with improved transfer characteristics | Mark Alan Lemkin, Allen W. Roessig, Thor Juneau | 2002-05-14 |
| 6296779 | Method of fabricating a sensor | Thor Juneau, Roger T. Howe | 2001-10-02 |
| 6291875 | Microfabricated structures with electrical isolation and interconnections | Thor Juneau, Allen W. Roessig, Mark Alan Lemkin | 2001-09-18 |
| 6253612 | Generation of mechanical oscillation applicable to vibratory rate gyroscopes | Mark Alan Lemkin, Thor Juneau, Allen W. Roessig | 2001-07-03 |
| 6230563 | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability | Thor Juneau, Mark Alan Lemkin, Allen W. Roessig | 2001-05-15 |
| 6121552 | Microfabricated high aspect ratio device with an electrical isolation trench | Timothy J. Brosnihan, James Bustillo | 2000-09-19 |
| 6067858 | Micromachined vibratory rate gyroscope | Thor Juneau, Roger T. Howe | 2000-05-30 |
| 5992233 | Micromachined Z-axis vibratory rate gyroscope | — | 1999-11-30 |