Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12440861 | Chemical liquid supply unit, substrate processing apparatus having the same, and chemical liquid supply method | John Jong-Suk Lee, Kai Ling Lee | 2025-10-14 |
| 10649518 | Adaptive power control loop | Jun Huang, Shahriar Pezeshgi, Alexander S. Duenas | 2020-05-12 |