Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5952246 | Nitride selective, anisotropic Cl.sub.2 /He etch process | Fei Wang, Shyam Garg | 1999-09-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5952246 | Nitride selective, anisotropic Cl.sub.2 /He etch process | Fei Wang, Shyam Garg | 1999-09-14 |