Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7816656 | Method of implanting ion species into microstructure products by concurrently cleaning the implanter | Christian Krueger, Rastislav Kocis, Marek Braun, Heinz H. Seidel | 2010-10-19 |
| 6949399 | Method of reducing contamination-induced process variations during ion implantation | Christian Krueger, Thomas Beck | 2005-09-27 |