Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7816656 | Method of implanting ion species into microstructure products by concurrently cleaning the implanter | Christian Krueger, Rastislav Kocis, Niels-Wieland Hauptmann, Heinz H. Seidel | 2010-10-19 |