Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7456110 | Method and apparatus for controlling etch selectivity | Jeremy Lansford | 2008-11-25 |
| 6328905 | Residue removal by CO2 water rinse in conjunction with post metal etch plasma strip | Joseph Lebowitz | 2001-12-11 |