Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5455894 | Wafer fabrication robotic interface unit | Michael R. Conboy, Kurt W. Nichter, John G. Zvonar | 1995-10-03 | $25,215,000 |
| 5444637 | Programmable semiconductor wafer for sensing, recording and retrieving fabrication process conditions to which the wafer is exposed | Michael R. Conboy | 1995-08-22 | $4,378,000 |
| 5354413 | Electrode position controller for a semiconductor etching device | Roger A. Sikes, Michael R. Conboy | 1994-10-11 | $24,398,000 |